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RHEED Electron Gun & Power Supply (RDA-003G/004P) |
RHEED Image Analysis System (kSA400) |
Real-time Monitoring of Wafer/Thin Film Temperature (kSA BandiT) |
Real-time Monitoring of Thin Film Curvature/ Stress (kSA MOS) |
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Ex-situ Curvature/Stress 2D/3D Mapping of Substrates up to 300mm (kSA MOS Ultra Scan) |
UHV Evaporator/ Magnetron Sputtering Cell |
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 Please click on the link, which will take you to Japanese page
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Rotary/Linear Motion Feedthrough |
UHV Manipulators |
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 Please click on the link, which will take you to Japanese page
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Vacuum Pump |
Vacuum Pump Peripheral Products |
Valve |
Vacuum component parts (O-ring, Nipple, Clump, etc.) |
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Flange |
Gasket |
Viewport |
Glass Component |
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Vacuum Gauge |
Gauge Head, Filament |
Quadruple Mass Spectrometer (Q-MS) |
Thin Film Deposition Growth Rate Monitor /Controller and Film Thickness Measurement |
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Electrical Feedthrough |
Leak Detector |
Heating/Cooling Equipment |
Mass Flow Controller (MFC), Mass Flow Meter, etc. |
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Others | |